Mega Fluid Systems is the pioneer in chemical and slurry delivery for the semiconductor market, and provides Total Molecule Delivery Solutions for all solar, LED, and high-tech UHP industries. 

We combine engineering excellence and technical expertise with unrivaled service and support to offer industry-leading products with advanced capabilities and superior reliability.

Our strong reputation for high-performance stems from our unique ability to customize slurry and chemical delivery systems for specific customer challenges and applications in the semi, solar/PV, LED, TFT, specialty chemicals, and pharmaceutical industries.

Mega will partner with your company to understand your process requirements, drawing on our extensive experience to provide a system which is reliable and robust... but with a low cost of ownership.

Our proprietary control algorithms maintain chemical/slurry blend accuracy and system pressure, while our modular system design enables rapid customization and shorter lead times.

Simply put, Mega provides world-class technology and service for all customers; it's our mission.

Gas or Vapor Handling Needs?

The Ceres-Mega Team offers ultra-high purity specialty gas, vapor, chemical and slurry handling products and services for semiconductor, solar, and life science industries. See www.cerestechnologies.com for more information.