About Mega Fluid Systems
Founded in 1990, Mega Fluid Systems has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries. With a global installed base in Asia, Europe, and North America, our state-of-the-art systems continue to be chosen by leading customers worldwide to deliver the most difficult chemistries and sensitive slurries to their CMP tools ... Read more
Latest News & Events
Mega Fluid Systems’ New MegaSafe Control Software Adds Fail-Safe Feature to Chemical and Slurry Dispense Tools
Learn more450mm: Challenges to Process Optimization and Yield
Tualatin, OR (July 17, 2015) – For at least the last 30 years, minimum features of devices have decreased, and the cost per transistor has also decreased.
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