About Mega Fluid Systems

Founded in 1990, Mega Fluid Systems has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries. With a global installed base in Asia, Europe, and North America, our state-of-the-art systems continue to be chosen by leading customers worldwide to deliver the most difficult chemistries and sensitive slurries to their CMP tools ... Read more

Chemical/Slurry Blend & Delivery Chemical/Slurry Delivery Slurry Filtration Metrology SCADA & Controls