Founded in 1990, Mega Fluid Systems has extensive experience offering world-class chemical and slurry delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries. With a global installed base in Asia, Europe, and North America, our state-of-the-art systems continue to be chosen by leading customers worldwide to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes.
FOR OVER TWENTY YEARS,
WE’VE ALWAYS BEEN TRUE TO WHAT WE STAND FOR: PRECISION INNOVATION RESULTS
Mega Fluid Systems offers world-class engineering, manufacturing, and testing capabilities. Mega’s partners benefit from high-level customer service and support from our program management, sales, engineering, service, and executive management teams.
Mega is headquartered in Tualatin, Oregon, with sales and engineering offices in Hsinchu, Taiwan, and a strong field service / engineering presence in Chandler, AZ.
Mega Fluid Systems, Inc., is a proud member of SEMI, a global industry association serving the micro- and nano-electronics industries.