Delton Hyatt


Delton brings 30 years experience in high purity thin film processing, semiconductor fabrication support, and process gas, slurry, and chemical delivery.

Delton began his career in business development at MKS Instruments, eventually becoming President of the Advanced Product Integration Division. He later joined the Mega Fluids (Chempure) subsidiary of Celerity (Kinetics) as the VP of Marketing, and eventually General Manager. Delton also served as the CEO of Zeihm Imaging and recently was involved in business acquisitions and integration for M+W and Total Facilities Solutions.

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Koh Murai, P.E.

Vice President of Engineering

Koh Murai, P.E., brings 35 years of engineering experience to Mega Fluid Systems. He has worked with slurry handling equipment, new product development, design, and manufacturing within the Semiconductor and industrial sectors.

Prior to joining Mega Fluid Systems, Koh Murai spent 8 years as the NPI Engineering Manager for Ichor Systems. Previously, Koh was the Engineering Manager for a contract aerospace design and build firm, preceded by 10 years in the same capacity with The Clarkson Company designing and producing a wide range of slurry control valves. Koh Murai has held design, project, process, and production engineering positions with polymer extrusion and heavy chemical manufacturing firms, in addition to a systems safety engineering position contracted to NASA.

Koh Murai has received his B.S.E in Chemical Engineering and is a registered Professional Engineer (Chemical) in Texas and Nevada. He is a senior member of the American Institute of Chemical Engineers and the American Institute of Aeronautics and Astronautics.

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Greg Hare

Vice President of Sales

Greg Hare brings 29 years of engineering and management experience in the Semiconductor, Chemical, Pharmaceutical, Food and Textiles industries. Greg is a commercial and business executive with success in directing a global business (P&L), specialty gas/chemical equipment and service, marketing, business development, strategic planning and global strategic account management.

Prior to Mega Fluid Systems, Greg served as the Director of Process Materials Sales at Versum Materials since 2016. In 2003, he joined Air Products through the acquisition of the Ashland Chemical Electronic Chemicals group. He was North American Sales Manager until 2011 when he became Director of Global Accounts. From 1998-2003, he progressed steadily through sales and regional management positions at Ashland Chemical prior to becoming the Western Region Sales Manager. Greg began his career in 1989 with Monsanto Company as a process engineer and later as a sales executive the in the Phosphorus and Derivatives Group.

Greg holds a B.S. in Chemical Engineering from the University of Idaho. He is a senior member of the American Institute of Chemical Engineers.

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Harvey Pinder

Director, Greater China and Southeast Asia

Harvey Pinder brings over 20 years of CMP, wet etch, metrology, epitaxy, and CVD experience in both equipment and consumables to Mega Fluid Systems. Harvey began his semiconductor career in 1993 as an Equipment Engineer and has since held varying positions including Field Service, Process Development, R&D, New Product Development, Project Management, Technical Account Management and Sales, Customer Service and Field Service Management, Regional Sales/Service Management and Consulting for Process and New Product Development, supporting primarily the Asian region for more than 19 years including living in Taiwan, Singapore, Philippines and China.

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Michael Yang

Regional Sales Vice President and General Manager

Michael Yang brings over 15 years’ experience in the semiconductor and solar industry. Michael began his semiconductor career as a Service/Application Engineer for IPEC and AMAT, and later in sales and process application with Rodel/RohmHaas/Dow Chemical. While there, he held positions in customer service, sales for pads & slurry, and UMC & D-RAM account management. He also established the RohmHaas China Shanghai office to strengthen the China territory. Michael’s solar experience includes 6 years at NewE Material in management of sales and R&D.

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Rob Eiseler

Engineering Manager

Rob Eiseler conveys over 25 years of product design, product engineering, manufacturing engineering and New Product Introduction (NPI) experience to Mega Fluid Systems as Engineering Manager.

Rob has worked in the process chemical delivery industry for 9 years. He has extensive experience in the design of industrial equipment for the slurry and process chemicals used in semiconductor manufacturing, including configuration management, document control, Design for Manufacturing (DFM) and NPI. Rob’s experience also includes prototype development for LCD and TFT displays, commercial and defense telecommunications product engineering, electronic assembly, and engineering laboratory management.

Rob holds a B.S. in Mechanical Engineering from Northern Arizona University.

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Chuck Mather

Service Manager

Chuck brings 27 years’ experience in the Semiconductor industry started in 1990 when he joined SCP Global Technologies as an FSE, supporting wet cleaning & etching equipment. His roles at SCP included all phases of Customer Support, Installation Management, and various Project Management. Focus for over 10 years included supporting 3 of the top tier-A Semiconductor Customers globally.

While at Akrion Systems, Chuck became the Customer Service Manager supporting the Asia region out of Taiwan. Later, with Veeco Instruments, his roles as Installation Manager had him placing over 300 MOCVD production systems both in South Korea and China, and later serving for 4 years in Santa Clara, California, as their NA and EMEA Customer Service Manager.

Chuck joined Mega Fluid Systems in August 2016 with a focus on all aspects of Customer engagements and satisfaction. His responsibilities include developing an effective service product offering, establishing an escalation protocol, service KPI and KBP development, and Field Service Technician certifications capturing all phases from Manufacturing, Cal/Test, Installations, warranty support and Project Preparation and Management.

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