Mega Fluid Systems Demonstrates Flow Mode Dynamic Light Scattering for In-line Particle Sizing of CMP Slurry

Tualatin, OR – April 16, 2013 – Mega Fluid Systems announced today its Research Engineers and Scientists are investigating Malvern Instruments flow mode DLS technology and developing new methods for CMP slurry. Koh Murai, VP of Engineering, presented the initial results at the Levitronix 29th European CMP Users Meeting in Zurich, Switzerland. The main objective of the work is to determine feasibility of using flow mode DLS for in-line characterization of CMP slurry.

Mega Fluid Systems Demonstrates Flow Mode Dynamic Light Scattering for In-line Particle Sizing of CMP Slurry

The presentation covers methods and apparatus, range of application flow rates, precision, and impact of heating due to extensive recirculation. Key conclusions are (1) flow mode DLS is promising for in-line slurry particle sizing, and (2) extensive recirculation did not result in measurable changes in mean particle size.

“We are very happy to take an active role in embedding leading-edge technologies, such as Malvern Instruments, into advanced particle measurement techniques critical to the CMP industry,” said Jack McCann, Mega Fluid System’s President. “It is yet another indication that Mega is committed to furthering our leadership position as the world’s superior resource for slurry blend and delivery equipment.”

Mega continues to work on challenges of flow control and accuracy of flow mode DLS. The new method is expected to provide a platform for in-line, high precision characterization of particle size distribution over the range 5 to 500nm, a size range critical to CMP slurry performance for 450mm and beyond.

Founded in 1990, Mega Fluid Systems has extensive experience offering leading-edge chemical and slurry blend and delivery equipment to the global semiconductor, LED, pharmaceutical, specialty chemicals, and solar/PV industries. With a global installed base in Asia, Europe, and North America, Mega’s industry leading systems continue to be the choice of high technology companies to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes.

Mega Fluid Systems offers world-class engineering, manufacturing, and testing capabilities. Mega’s partners benefit from high-level customer service and support from our Program Management, Sales, Engineering, Service and Executive Management teams.

The company’s headquarters are at 9398 SW Tualatin-Sherwood Rd. in Tualatin, OR 97062. Additional Sales, Engineering, and Service offices are located in Saugerties, NY, Hsinchu, Taiwan, as well as a strong Field Service Engineering presence in Chandler, AZ. For further information about Mega Fluid Systems, contact Sales at, call 971.277.9000, or visit