Mega Fluid Systems Controls Engineering Group supplies turn-key control, monitoring, and automation solutions for molecular delivery tools. Our team of Controls and Electrical Engineers have extensive experience in the following applications:

  • Automating Chemical and Slurry Blending and Distribution systems
  • Designing intuitive HMI and SCADA applications
  • Providing plug-and-play network connectivity solutions, and
  • Providing alarm, graphing & charting, and reporting services.

Utilizing state-of-the-art visualization software, our team creates graphical user interfaces that show the user the information they need, when they need it – information rich when the application requires it and always clear and intuitive. System overviews, drill-downs to P&ID-based details, set point and recipe control, alarm monitoring and acknowledgment, and special custom features implemented after extensive collaboration with the system users are all part of the Mega Fluid Systems HMI experience.

PLC Controls

Mega Fluid Systems offers PLC- or PAC-based control systems for the control and automation of both Chemical and Slurry Blend and Distribution systems. Choosing the control system that makes sense fo...

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MegaSafe™ is control software designed to maintain global loop dispense to point-of-use chemical mechanical planarization (CMP) and cleaning tools in the event of a programmable logic controller (...

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