Mega Fluid Systems Controls Engineering Group supplies turn-key control, monitoring, and automation solutions for molecular delivery tools. Our team of Controls and Electrical Engineers have extensi...Learn more
Mega Fluid Systems offers PLC- or PAC-based control systems for the control and automation of both Chemical and Slurry Blend and Distribution systems. Choosing the control system that makes sense for the individual tool, we utilize rack and/or distributed IO, and internal and external networking and communications to control and monitor the tool’s key devices – pumps, valves, tanks, metrology (pH, SGU, concentration, particle size, titration, and temperature).
- Built using same software tool as system HMI
- Remote option using VNC
- Web-client option
- Paging/e-mail options
- Increased functionality and flexibility
MegaSafe™ is control software designed to maintain global loop dispense to point-of-use chemical mechanical planarization (CMP) and cleaning tools in the event of a programmable logic controller (...Learn more