Service & Maintenance

Mega Fluid System’s highly-skilled core Field Service team has an average tenure of 8+ years, with 12 years experience enjoyed by our most senior technician. Each FSE has proven qualities as an expert in installation, performing upgrades and retrofits, as well as maintaining Mega Fluid Systems chemical and slurry delivery system equipment, gaining respect in the field from customers worldwide.


Mega field service personnel will travel to a customer site and conduct on-tool and classroom training to local operators, enabling them to operate equipment and perform simple maintenance and troubleshooting procedures.

Spare Parts Supply

Customers receive low OEM pricing and can take comfort in knowing they are buying manufacturer approved parts guaranteed to work out of the box.

Spare Parts

Tool Retrofits / Upgrades / Rebuilds

Mega is constantly improving its products and routinely develops upgrades to increase tool performance. Customers often find upgrades are a more economical alternative to meeting new technology needs.

Pump Rebuild Service

Mega Fluid System’s select Pump Rebuild Service is aimed at providing a top-notch return on investment for your high purity pumps. At the heart of Mega’s select Pump Rebuild Services are experienced, factory-trained service technicians. Together with full engineering support and a comprehensive quality control program, these skilled technicians will inspect your pump for component wear and process contamination, rebuild it using all OEM parts and service protocols, and finally, test for quality and functionality.

Learn More about Mega’s Pump Rebuild Service

Site Audit Services

Mega offers a site audit service for existing equipment owners. Mega Field Service personnel will travel to a customer site and perform an equipment audit, providing a full report indicating maintenance, upgrade, or replacement options for Mega legacy equipment sets.

Learn more about Site Audits